This is the latest oxygen analyzer from Yokogawa, and its development was based on the company's long experience and strong track record with this technology.
A proprietary new thin-film deposition technology was used in the zirconia sensor that creates a molecular bond between the zirconia element and the platinum layer. This prevents separation, enables a reduction in sensor size and ensures a high-speed response and long life.
The OX400 can be used to control and monitor various semiconductor applications, and to control environment, air leakage into inert gas, and other processes.

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Oxygen concentration control in semiconductor-related diffusion and drying furnaces and in LCD manufacturing processes

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Oxygen concentration control in solder pot flow and re-flow ovens, and glove boxes used in electronics manufacturing, and in gas production processes

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Oxygen concentration measurements to prevent dust explosions during powder transfer

 Bulletin for OX400

 General Specification for OX400

 User's Manual for OX400

 Selection Guide for Oxygen Analyzer

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Thanks to the use of Yokogawa's proprietary new thin-film deposition technology, the sensor has three times the lifespan of those used in our earlier products

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A cylindrical sensor design facilitates the replacement of measurement gases, thereby helping to assure a high-speed response

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Superior repeatability and linearity even at low oxygen concentrations

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Either pump or aspirator sampling can be selected, depending on the application

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Comes with multi selector, auto range, partial range, and pump on/off functions

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A variety of self-diagnosis functions are provided that detects malfunctions such as heater temperature error, temperature sensor burnout, and sensor resistance value error.

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The sensor can be replaced on-site

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Compact and lightweight for easy installation

Measurement object

Oxygen concentrations in inert gases containing no flammable gas, silica, corrosive gas, or liquid (including water vapor)

Measurement system

Zirconia system

Sampling method

Pump, aspirator, or no suction device

Sample gas conditions

Flow rate: 200 ± 25 ml/min (only applies to sensor)
Temperature: 0-50℃ (non-condensing)
Humidity: Non-condensing
Pressure: 0-300 PaG
Max. tolerance pressure: 30 kPaG

Measurement range

0-10 ppm O₂ to 0-100 vol% O₂

Output range

Analog output

2 outputs,
Primary: 4 to 20 mA DC (maximum load resistance: 550Ω )
Secondary: Select from 0-1, 0-5, 0-10 V DC (load resistance: 10 kΩ or greater)

Contact output

Contact input

1 point; remote switching for sample gas suction pump ON/OFF

Self-diagnostics

Serial communication

RS-232,38400 bps

Calibration methods

(1) 3 point: 10 ppm, 1000 ppm, air, (2) 2 point: zero and span calibration may be set freely, (3) 1 point, (4) Air calibration

Warm-up time

Within 20 min

Power supply

100 - 120 V AC/200 - 240 V AC, 50/60 Hz

Power consumption

100 to 120 V AC, 200 VA max., 200 to 240 V AC, 400 VA max

Dimension

213 (W) x 132 (H) x approx. 375 (D) mm

Weight: Approx.

5 kg

Line connection

gas inlet: Rc1/4 or 1/4NPT female
gas outlet: Rc1/4 or 1/4NPT female

Environment and operational conditions

Conformance to safety and EMC standards

Repeatability

±1% FS (Hereafter, either 10, 100, 1000 ppm, 1%, 10%, or 100% O₂ is FS)

Linearity

±2% FS
±3% FS (0-100 ppm or less)

Response time

90% response
within 10 sec (0-1% or more)
within 30 sec (less than 0-1%)

Drift

±2% FS / week